PDP² - Plasma diagnostics for Plasma Processes 4.0


Target:


  • process data evaluation for follow-up projects Plasma 4.0
  • ensuring process stability
  • reduction of process times (resource efficiency)


 

Motivation:


  • intensity measurements and/or
  • compositions and/or
  • acquisition of generator characteristics and resulting gas atmospheres



Tasks:


  • plasma process data monitoring,
  • measurement of ion density,
  • comparison of mass spectrometer measurements | Langmuir probe | OES

 


 

Project duration:                                ca. 12 months

Contribution per partner:                   9,000 € plus VAT.


 

 

Scientific partners: Fraunhofer IST,

expertise in the field will also be contributed by: INP Greifswald

 

Contact:                                   

Carola Brand | INPLAS e.V. | T: +49 531 21 55 574 |carola.brand@inplas.de