BMWi: Technology transfer lightweight construction |
KMU-innovative: Bioeconomy |
BMWi: WIPANO |
KMU-innovative: Medical Engineering |
KMU-innovativ: Production Research |
KMU-innovative: Photonic and quantum technologies |
Announcement of the BMWi: EXIST |
KMU-innovative: Ressource Efficiency and Climate Protection |
KMU-innovative: Photonics |
BMBF: Battery 2020 Transfer |
BMBF: HyMat |
BMBF: Innovative medical technology |
BMVI: Hydrogen and Fuel Cell Technology Innovation Program Phase II |
BMWI: Investments for vehicle manufacturers and supplier industry |
BMWi: Starting signal for future investments in the automotive industry |
BMBF: European security research |
BMBF: High-performance components and optimized materials for quantum communication |
KMU-innovative: Interactive technologies for health and quality of life |
KMU-innovative: Resource efficiency and climate protection |
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scia Systems is a full range supplier of advanced ion beam and plasma processing equipment. The systems are applicable for coating and etching processes in the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as research and development environments.
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Due to their flexible and modular design, the systems can be configured according to customer specific requirements. Amongst others by combining several vacuum process chambers into cluster or in-line solutions. Together with our worldwide service partners, we offer comprehensive service and superior technology support.
Technology Portfolio
28th INPLAS-WG "Novel Plasma Sources and Processes"
28.06.2022, Stuttgart
21.-22.09.2022, Mannheim
29th INPLAS-WG "Novel Plasma Sources and Processes"
24.11.2022