When CCR Technology was founded in 1995, it began developing RF plasma technology. It wanted to add a simple contribution to the industrial plasma community. More than 1500 units in more than 40 countries around the world have been sold in key markets such as solar, precision optics, storage media, semiconductors or hard and decorative coatings. But it is not only COPRA that has caused this success.


  • COPRA Round Sources
  • COPRA Linear Sources
  • COPRA Ring Sources
  • COPRA Built-in sources
  • Faraday Cup



  • Pecvd
  • PVD support
  • Etching
  • Cleaning
  • Activation
  • PALD support